Optimization of SAW and EIS sensors suitable for environmental particulate monitoring

Chiriaco, Maria; Rizzato, Silvia; Primiceri, Elisabetta; Spagnolo, Sandro; Monteduro, Anna Grazia; Ferrara, Francesco; Maruccio, Giuseppe

doi:10.1016/j.mee.2018.10.008

Cited by 18 publications

(15 citation statements)

References 23 publications

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“…Chiriacò et al [60] realized a particles sensor that employed both Rayleigh SAW delay lines and electrochemical impedance spectroscopy (EIS) for particle detection, each detector comprising an array of eight sensing areas. The devices were fabricated on ST-cut quartz wafers on which Al IDTs for the SAW delay lines and Au IDTs for EIS were patterned, after which microfluidics were fabricated by replica molding with PDMS using a 200 μm high SU-8 hard master.…”

Section: Particle Detectors and Their Performance Characteristicsmentioning

confidence: 99%

“…The procedure was repeated seven times for the SAW sensors and 5 times for EIS sensors, respectively, in order to achieve increasing concentration of particles. Thus, the devices did not include any component for size differentiation of the particles and testing also did not consider characterizing the sensitivity for particles of different sizes or detecting the particle numbers/concentration; instead it focused on detecting the total mass only [60].…”

Section: Particle Detectors and Their Performance Characteristicsmentioning

confidence: 99%

“…Extremely few impedance-based particle sensors have been reported previously. Besides the DLD device of Huang et al [40] (see again Section 2.3), only the previously mentioned work of Chiriacò et al [60] also used impedance for particle sensing (see Section 3.2.1). However, neither was tested with airborne particles.…”

Section: Particle Detectors and Their Performance Characteristicsmentioning

confidence: 99%

“…When both 1 μm and 200 nm particles were mixed together, the impedance sensors output varied linearly with both the total mass and number of particles, with an estimated mass sensitivity of 45 Ω/ng and a LOD of ~2.8 ng. However, the impedance detection of 40 nm particles was not possible, and the authors hypothesized that this was due to particle desorption caused by a too small adhesion (roughly proportional to the particle radius) [60].…”

Section: Particle Detectors and Their Performance Characteristicsmentioning

confidence: 99%

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Microfluidic and Micromachined/MEMS Devices for Separation, Discrimination and Detection of Airborne Particles for Pollution Monitoring

Poenar

2019

Micromachines

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Most of the microfluidics-related literature describes devices handling liquids, with only a small part dealing with gas-based applications, and a much smaller number of papers are devoted to the separation and/or detection of airborne inorganic particles. This review is dedicated to this rather less known field which has become increasingly important in the last years due to the growing attention devoted to pollution monitoring and air quality assessment. After a brief introduction summarizing the main particulate matter (PM) classes and the need for their study, the paper reviews miniaturized devices and/or systems for separation, detection and quantitative assessment of PM concentration in air with portable and easy-to-use platforms. The PM separation methods are described first, followed by the key detection methods, namely optical (scattering) and electrical. The most important miniaturized reported realizations are analyzed, with special attention given to microfluidic and micromachined or micro-electro-mechanical systems (MEMS) chip-based implementations due to their inherent capability of being integrated in lab-on-chip (LOC) type of smart microsystems with increased functionalities that can be portable and are easy to use. The operating principles and (when available) key performance parameters of such devices are presented and compared, also highlighting their advantages and disadvantages. Finally, the most relevant conclusions are discussed in the last section.

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Section: Particle Detectors and Their Performance Characteristicsmentioning

confidence: 99%

Section: Particle Detectors and Their Performance Characteristicsmentioning

confidence: 99%

Section: Particle Detectors and Their Performance Characteristicsmentioning

confidence: 99%

Section: Particle Detectors and Their Performance Characteristicsmentioning

confidence: 99%

See 2 more Smart Citations

Microfluidic and Micromachined/MEMS Devices for Separation, Discrimination and Detection of Airborne Particles for Pollution Monitoring

Poenar

2019

Micromachines

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“…There is particular concern about the toxic effects of ultra-fine particulate matter (particles less than 100 nm diameter) and, so, much recent attention has been provided to studying the effect of ultra-fine particulates on human health [13][14][15]. The European Environment Agency's Outlook for 2050 estimates that the worldwide premature deaths from exposure to the particulate matter would be 2.5 million times higher than that of the deaths expected to result from ozone pollution [16].…”

Section: Introductionmentioning

confidence: 99%

Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

Chellasivalingam

Imran

Pandit

et al. 2020

Sensors

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This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS (Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine particulates. As a proof-of-principle, the detection of diesel soot particles of 100 nanometres or less is demonstrated. A practical monitoring context also exists for diesel soot particles originating from combustion engines, as they are of serious health concern. The MEMS sensors employed in this work operate on the principle of vibration mode-localisation employing an amplitude ratio shift output metric for readout. Notably, gains are observed while comparing parametric sensitivities and the input referred stability for amplitude ratio and resonant frequency variations, demonstrating that the amplitude ratio output metric is particularly suitable for long-term measurements. The soot particle mass directly estimated using coupled MEMS resonators can be correlated to the mass, indirectly estimated using the condensation particle counter used as the reference instrument.

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Advances in Materials and Technologies for Gas Sensing from Environmental and Food Monitoring to Breath Analysis

Milone

Monteduro

Rizzato

et al. 2022

Advanced Sustainable Systems

Self Cite

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Figure 2. a) Pie chart illustrating the use of n-type and p-type metal oxides materials in gas sensing research (reproduced with permission. [23] Copyright 2014, Elsevier B.V.); b) schematics of a typical chemiresistors (e.g., based on WO 3 -films) (reproduced with permission. [55] Copyright 2007, IEEE); c) response of a solid-state impedance NO x gas sensor upon NO exposure (reproduced with permission. [56] Copyright 2003, Elsevier B.V.). d) Illustration of gas sensing through a mesoporous material with different analyte percolation ability (reproduced with permission. [24] Copyright 2013, Royal Society of Chemistry); e) grain size effect in n-type semiconducting metal oxide gas sensors (reproduced with permission under the term of CC-BY license. [57] Copyright 2012, the Authors, published by MDPI); f-h) crystalline ordered mesoporous WO 3 /Pt composites schematic and FESEM images (reproduced with permission. [47] Copyright 2018, Elsevier B.V.); i) typical response curves of In(III)-SnO 2 loaded cubic mesoporous graphitic carbon nitride sensor when exposed to toluene vapors at a working temperature of 200 °C; l,m) response to 50 ppm and 1 ppm toluene gas at 200 °C (reproduced with permission. [53] Copyright 2018, Elsevier B.V.).

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Optimization of SAW and EIS sensors suitable for environmental particulate monitoring

Cited by 18 publications

References 23 publications

Microfluidic and Micromachined/MEMS Devices for Separation, Discrimination and Detection of Airborne Particles for Pollution Monitoring

Microfluidic and Micromachined/MEMS Devices for Separation, Discrimination and Detection of Airborne Particles for Pollution Monitoring

Weakly Coupled Piezoelectric MEMS Resonators for Aerosol Sensing

Advances in Materials and Technologies for Gas Sensing from Environmental and Food Monitoring to Breath Analysis

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