This study reports on a series of crosslinked poly(arylene ether)s with POSS in the main chain. The fluorinated and terminated poly(arylene ether)s were first synthesized by the nucleophilic reaction of diphenol POSS and decafluorodiphenyl monomers, including decafluorobiphenyl, decaflurobenzophenone, and decafluorodiphenyl sulfone. They were then reacted with 3-hydroxyphenyl acetylene to produce phenylacetylene-terminated poly(arylene ether)s. The polymers were of excellent processability. When heated to a high temperature, the polymers converted into a crosslinked network, exhibiting a low range of dielectric constant from 2.17 to 2.58 at 1 HMz, strong resistance against chemical solutions, low dielectric losses, and good thermal and hydrophobic properties.