Oxidation and Gate Dielectrics

Cleavelin, C.R.; Colombo, Luigi; Niimi, H.; Pas, Sylvia; Vogel, Eric M.

doi:10.1201/9781420017663-9

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“…The layer thickness d ε is analyzed by AES analysis. Compared with other commonly used methods [39,40], AES can provide the chemical composition information and measure the distribution of the material on the electrode in the same time [41,42]. The energy of Auger electron is analysed as the indication of a specific element atom.…”

Section: Experiments Resultsmentioning

confidence: 99%

Effects of dielectric charging on the output voltage of a capacitive accelerometer

Zhou

et al. 2016

J. Micromech. Microeng.

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Output voltage drifting observed in one typical capacitive microelectromechanical system (MEMS) accelerometer is discussed in this paper. Dielectric charging effect is located as one of the major determinants of this phenomenon through a combination of experimental and theoretical studies. A theoretical model for the electromechanical effects of the dielectric surface charges within the electrode gap is established to analyze the dielectric charge effect on the output voltage. Observations of output voltage drift against time are fitted to this model in order to estimate the possible dielectric layer thickness. Meanwhile, Auger electron spectroscopy is carried out to analyze the electrode surface material composition and confirms a mixture layer of dielectric SiO 2 and Si with a thickness about 5 nm, which is very close to the model estimation. In addition, observation of time-varing output drift in the variable bias voltage experiment indicates the movement of dielectric charge can be controlled by the applied electric field.

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Section: Experiments Resultsmentioning

confidence: 99%

Effects of dielectric charging on the output voltage of a capacitive accelerometer

Zhou

et al. 2016

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

Oxidation and Gate Dielectrics

Cited by 1 publication

References 0 publications

Effects of dielectric charging on the output voltage of a capacitive accelerometer

Effects of dielectric charging on the output voltage of a capacitive accelerometer

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