Parallel-Plate Wet Denuder Coupled Ion Chromatograph for Near-Real-Time Detection of Trace Acidic Gases in Clean Room Air

Atmospheric Acid Gases in Tokushima, Japan, Monitored with Parallel Plate Wet Denuder Coupled Ion Chromatograph

“…Details of the PPWD-IC have been described previously. 17,18 In short, the PPWD is composed of two textured Plexiglas plates and a Teflon spacer (each with a 6 × 42 cm active area, separated by 0.3 cm). The air sample is aspirated from the bottom of the PPWD at 5 dm 3 min -1 .…”

“…[13][14][15][16] We recently reported on a parallel plate wet denuder coupled ion chromatograph (PPWD-IC), which allows for highly sensitive and high time resolution monitoring of trace acid gases in an industrial cleanroom environment. 17 With PPWD-IC, we continuously measured the concentrations of atmospheric HCl, HONO, HNO3, and SO2 in Tokushima, Japan. We discuss here the seasonal/circadian variations of acid gases using the high time resolution data.…”

Review—Airborne Molecular Contamination: Recent Developments in the Understanding and Minimization for Advanced Semiconductor Device Manufacturing

“…By comparing with parallel quantification by conventional TD-GC/MS for analyzing the total VOC concentration outgassed from four different types of cleanroom-grade adhesives, the investigators were able to verify the applicability of the method for online, continuous screening of material outgassing. Ionic AMCs.-An abundance of reports has demonstrated airborne acids and bases originating from the environment and processes 15,16 can transport to wafer handling and storage environments and present a significant risk of cross contaminations. For acids, fluorine and chlorine are two of the most detrimental contaminants because of their corrosiveness to both metal and polymers.…”

Surface modified annular wet denuder for the collection of water-soluble trace gases

“…3 We have successfully measured the concentrations of trace acidic gases in cleanrooms and atmospheric environments by means of a parallel plate wet denuder coupled with an ion chromatograph. 4,5 Jaeschke et al presented a single tubular wet denuder with a nylon stocking lining. 6 Keuken et al reported a rotating annular wet denuder which operated in the horizontal conguration.…”