Particle charge fluctuation and its consequences on aerosol dynamics in dusty plasmas: from continuous to discrete statistical models

Swaminathan, P. K.; Longo, S.; Hassouni, K.

doi:10.1088/1361-6587/ab469f

Cited by 7 publications

(8 citation statements)

References 25 publications

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“…However, under the investigated discharge conditions this mode is largely dominated by negatively charged particles, while the positively charged ones can be completely neglected, i.e. n + p << n (0) p < n − p [24]. Therefore, the coagulation of two particles from the nucleation mode essentially involves a neutral particle and a negative particle.…”

Section: Coagulation Source Termmentioning

confidence: 97%

An effective approach for aerosol dynamics modeling in dusty plasma

Tetard,

Michau,

Prasanna

et al. 2024

J. Phys. D: Appl. Phys.

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In this paper, we demonstrate the application of Dirac-lognormal bimodal moment approach to investigate aerosol dynamics in dusty plasma. The resulting model was evaluated by comparison with the detailed and computationally expensive sectional approach for two dusty plasma systems. The first one is a sputtering Argon DC discharge and the second is a Capacitively Coupled Ar/C2H2RF discharge. The results obtained by the bimodal and the sectional approaches are in good agreement for sputtering DC discharge where the aerosol dynamics is dominated by nucleation and surface deposition growth. This agreement is obtained not only on the averaged characteristics of the particle cloud, but also on the detailed particle size distributions (PSDs). In the case of CCRF discharge a satisfactory agreement between the two approaches is obtained on the averaged characteristics and on the core distributions of the particle cloud even if a significant difference is observed at low and intermediate particle size. The bimodal moment approach is therefore accurate enough for the simulation of the dusty plasmas. Its low-computational cost makes it a very effective method as far as dusty plasma simulation is concerned.

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Section: Coagulation Source Termmentioning

confidence: 97%

An effective approach for aerosol dynamics modeling in dusty plasma

Tetard,

Michau,

Prasanna

et al. 2024

J. Phys. D: Appl. Phys.

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“…It was shown that, for OML theory of particle charging, the particle charge distribution can be represented as a Gaussian Russell 1995, 1997). However, it has to be noted that charge is discrete and modeling particle charging using a continuous model may not accurately describe the charging process (Michau et al 2019). This is especially the case when the charge fluctuation is of the same order as the average charge, which usually takes place for small solid particles, i.e.…”

Section: Models Of the Kinetic And Thermal Behavior Of Nanoparticles ...mentioning

confidence: 99%

“…Figure 4 shows the charge distribution for nanoparticles of different sizes obtained using Monte Carlo simulations inside a plasma as described in Michau et al (2019). While the Gaussian approximation for charge distribution was appropriate for large particles, such an approximation is no more correct for very small particles.…”

Section: Models Of the Kinetic And Thermal Behavior Of Nanoparticles ...mentioning

confidence: 99%

Stochastic models of systems for Nanotechnology: from micro to macro scale

Longo

Hassouni

et al. 2021

Nanotechnology

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Computer modeling technique based on the theory of stochastic processes have been used in order to provide a realistic simulation of the behavior of nanoscopic systems, related in particular to plasma reactors in microelectronic device production. Basing on decades of experience, we show here, with new results, that the universality of such methods allows the development of codes with the highest reusability and versatility, crossing the barrier of scale. At the smallest scale, the quantum calculation of the potential energy surface and spectroscopic properties of hydrogen species under nanoconfinement conditions display the effects due to the dimension and the symmetry of the confining potential well. Nanoparticles dispersed as aerosol in plasma feature strong fluctuations in temperature and charge which may affect the processing of silicon wafers. At the macroscopic scale, using a stochastic solution of transport equations, it is possible to describe laboratory or industrial systems for the production or treatment of nanomaterials, also exploiting the analogy between neutral particle transport and radiative transfer and information obtained by molecular simulations. These findings are relevant in the control of solid-particle contamination in the manufacture of electronic components and in other fields.

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“…As a result, the dust particles can be distributed in different places of the plasma reactor. In addition, knowledge of the dust charge distribution is very important when describing the coagulation kinetics for nanometre-sized dust particles [43]. Accounting for the charge fluctuations in dust charging models is crucial for dust particles with small charges that can fluctuate with a magnitude comparable to the mean value of the charge [39,42,[44][45][46].…”

Section: Introductionmentioning

confidence: 99%

Plasma properties and discharging of dust particles in an Ar/C₂H₂ plasma afterglow

Denysenko,

Mikikian,

Azarenkov

2024

J. Phys. D: Appl. Phys.

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A global (volume averaged) model is developed for an argon-acetylene plasma afterglow. The model is used to study the electron and ion densities, electron temperature and densities of argon metastable atoms in the afterglow plasma. The calculated time dependence for the electron density is found to be in agreement with the existing experimental data. These calculated plasma characteristics are used to investigate the dust charge distribution function (DCDF) for particles with radii of 10-200 nm. The DCDF is found by solving numerically the master equation describing dust discharging as a one-step stochastic process and is also calculated as a Gaussian distribution with mean dust charge and variance, which are functions of time. The time dependences for mean dust charge, variance and dust charging time are obtained and analyzed. If the electronegativity of the plasma in the steady-state is low, negative ions do not affect much discharging of dust particles in the afterglow, while at large electronegativity their role is essential. In the case of low electronegativity, discharging of dust particles is mainly due to deposition of positive ions with small and moderate masses (less than the mass of C10H6+ ions). Increasing electronegativity, the effect of heavy positive ions on dust discharging in the late afterglow is important. Secondary electron emission from dust surface at collisions of metastable atoms appears to be negligible.

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Particle charge fluctuation and its consequences on aerosol dynamics in dusty plasmas: from continuous to discrete statistical models

Cited by 7 publications

References 25 publications

An effective approach for aerosol dynamics modeling in dusty plasma

An effective approach for aerosol dynamics modeling in dusty plasma

Stochastic models of systems for Nanotechnology: from micro to macro scale

Plasma properties and discharging of dust particles in an Ar/C₂H₂ plasma afterglow

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Particle charge fluctuation and its consequences on aerosol dynamics in dusty plasmas: from continuous to discrete statistical models

Cited by 7 publications

References 25 publications

An effective approach for aerosol dynamics modeling in dusty plasma

An effective approach for aerosol dynamics modeling in dusty plasma

Stochastic models of systems for Nanotechnology: from micro to macro scale

Plasma properties and discharging of dust particles in an Ar/C2H2 plasma afterglow

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Plasma properties and discharging of dust particles in an Ar/C₂H₂ plasma afterglow