2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2018
DOI: 10.1109/asmc.2018.8373148
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Particle reduction in high temperature sulfuric acid using PTFE membrane filter and low pulsation bellows pump

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“…The essence of improving service life of stressed components is to reduce the maximum stress, 6 and engineers always use stronger materials or improve the structure to achieve it. In terms of materials, bellows equipped on bellows pump is mainly fabricated of polytetrafluoroethylene (PTFE), 7 which increases the life of bellows with its high chemical resistance and good endurance on repeated alternating loads and deformations. However, even with the same material, different structures will also significantly affect the stress of the bellows.…”
Section: Introductionmentioning
confidence: 99%
“…The essence of improving service life of stressed components is to reduce the maximum stress, 6 and engineers always use stronger materials or improve the structure to achieve it. In terms of materials, bellows equipped on bellows pump is mainly fabricated of polytetrafluoroethylene (PTFE), 7 which increases the life of bellows with its high chemical resistance and good endurance on repeated alternating loads and deformations. However, even with the same material, different structures will also significantly affect the stress of the bellows.…”
Section: Introductionmentioning
confidence: 99%