Passivation, Separation and Characterization of Plasma Synthesized Silicon Nanoparticles

Abstract

Silicon nanoparticles (Si NPs) were synthesized by plasma enhanced chemical vapor deposition (PECVD) using silane as a silicon source. Allylamine was used as passivation ligands to form water-soluble Si NPs. Finally, aqueous asymmetric flow field-flow fractionation was used to successfully separate the polydisperse Si NPs into monodisperse Si NP fractions.