2020
DOI: 10.3390/e22030295
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Path Planning of Pattern Transfer Based on Dual-Operator and a Dual-Population Ant Colony Algorithm for Digital Mask Projection Lithography

Abstract: In the process of digital micromirror device (DMD) digital mask projection lithography, the lithography efficiency will be enhanced greatly by path planning of pattern transfer. This paper proposes a new dual operator and dual population ant colony (DODPACO) algorithm. Firstly, load operators and feedback operators are used to update the local and global pheromones in the white ant colony, and the feedback operator is used in the yellow ant colony. The concept of information entropy is used to regulate the num… Show more

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Cited by 4 publications
(3 citation statements)
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“…The settings of each parameter in the ant colony algorithm will affect the performance of the algorithm. In the existing related research [49], the parameter settings of the ant colony algorithm usually need to be determined based on past experience and comparative experiments.…”
Section: Setup Of Experimental Parametersmentioning
confidence: 99%
“…The settings of each parameter in the ant colony algorithm will affect the performance of the algorithm. In the existing related research [49], the parameter settings of the ant colony algorithm usually need to be determined based on past experience and comparative experiments.…”
Section: Setup Of Experimental Parametersmentioning
confidence: 99%
“…Hub et al [13] propose the maximum and minimum ant strategy, the pheromone concentration on the map is limited between the maximum pheromone concentration and the minimum pheromone concentration. Wang et al [19] propose a new dual-operator and dual-population ant colony optimization (DODPACO) algorithm, the load operators are adopted to limit the accumulation of the pheromone on the path in the early search path, and adjust the pheromone concentration on the path to avoid falling into the local optimum. Gao et al [16] propose a path merging strategy, which connects different paths from different ants to jump out of the local optimum and obtain the global optimal path.…”
Section: Related Workmentioning
confidence: 99%
“…The ant colony algorithm [ 8 ], one of the representative bionic algorithms, draws a lesson from the behavior of ants exploring paths to find food, showing strong robustness. However, it has the problems of slow convergence and a poor quality of the solution when dealing with large-scale problems [ 9 ]. The artificial potential field (APF) [ 10 ] method assumes a gravitational force of the goal state and repulsive forces of the obstacles.…”
Section: Introductionmentioning
confidence: 99%