Pentacene Nano-Particles Film Modified Microstructure Silicon for NH₃ Gas Sensor Application

Abstract

We reported on the development of pentacene nano-particles film modified microstructure silicon (MSS) for ammonia (NH 3 ) gas sensors. The MSS was fabricated by alkaline etching process, then pentacene film and interdigital electrodes were deposited on the MSS surface by vacuum evaporation. The surface morphologies of the MSS and pentacene film were characterized by scanning electron microscope (SEM). And the properties of the sensor were measured at room temperature. The SEM images showed the MSS exhibited a uniform hemisphere array, and pentacene nano-particles film was formed evenly on the MSS surface. The fabricated sensor showed reversible and favorable response to NH 3 .