Proceeding of 8th Thermal and Fluids Engineering Conference (TFEC) 2023
DOI: 10.1615/tfec2023.est.045905
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Performance Comparison of Battery Thermal Management Systems Based on Numerical Simulation

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“…Among the various methods used to produce thin films, sputtering, a form of physical vapor deposition, has gained considerable attention in recent years [25,26]. This technique involves ejecting atoms or molecules from a source material (the target) and depositing them onto a substrate to form a thin film [27][28][29][30][31]. Sputter targets, particularly those intended for research purposes, must meet specific criteria despite their relatively small size [29,[32][33][34].…”
Section: Introductionmentioning
confidence: 99%
“…Among the various methods used to produce thin films, sputtering, a form of physical vapor deposition, has gained considerable attention in recent years [25,26]. This technique involves ejecting atoms or molecules from a source material (the target) and depositing them onto a substrate to form a thin film [27][28][29][30][31]. Sputter targets, particularly those intended for research purposes, must meet specific criteria despite their relatively small size [29,[32][33][34].…”
Section: Introductionmentioning
confidence: 99%