2015
DOI: 10.1063/1.4919763
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Perspective: Oxide molecular-beam epitaxy rocks!

Abstract: Molecular-beam epitaxy (MBE) is the “gold standard” synthesis technique for preparing semiconductor heterostructures with high purity, high mobility, and exquisite control of layer thickness at the atomic-layer level. Its use for the growth of multicomponent oxides got off to a rocky start 30 yr ago, but in the ensuing decades, it has become the definitive method for the preparation of oxide heterostructures too, particularly when it is desired to explore their intrinsic properties. Examples illustrating the u… Show more

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Cited by 99 publications
(60 citation statements)
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“…Similar to MBE of SrTiO 3 25,26 and other complex oxides, 14 these results emphasize the importance of stoichiometry control and the use of a low energetic deposition technique in attaining high quality perovskite films. The results furthermore show that mobilities can likely be increased further by the development of substrates with lower mismatch.…”
mentioning
confidence: 64%
“…Similar to MBE of SrTiO 3 25,26 and other complex oxides, 14 these results emphasize the importance of stoichiometry control and the use of a low energetic deposition technique in attaining high quality perovskite films. The results furthermore show that mobilities can likely be increased further by the development of substrates with lower mismatch.…”
mentioning
confidence: 64%
“…Considering the recent progress in growing oxide heterostructures along different crystallographic directions, [18][19][20][21][22] and the drive towards integrated oxide electronics, 23,24 ultrathin films of transition metal oxides (TMOs) appear to be an attractive possibility in the above context. Compared to s or p orbitals based systems, TMOs with d orbital dominated band structure has the possibility of high temperature realization.…”
Section: -11mentioning
confidence: 99%
“…Recent advances in growth techniques for complex oxides have led to remarkable progress in the ability to control film stoichiometry, thereby enabling improvements in their properties, often by orders of magnitude [1]. Despite these successes, even small concentrations of unavoidable point defects can control the properties of complex oxides.…”
Section: Introductionmentioning
confidence: 99%