Phase relations in the Pt–Ga–Sb system at 500°C

Markovski, SL Slobodan; Pleumeekers, Mclp Matty; Kodentsov, AA Alexander; Loo, van Fjj Frans

doi:10.1016/s0925-8388(97)00622-1

Cited by 9 publications

(7 citation statements)

References 4 publications

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“…The isothermal section at 500°C shown in Fig. 1c also includes experimental results by Markovski et al 24 Binary phases in equilibrium with GaSb at this temperature are Ga 7 Pt 3 , Ga 2 Pt, and PtSb 2 ( Table I). All three phases coexist with GaSb up to temperatures of 686°C (phase field: GaSb ϩ Ga 2 Pt ϩ PtSb 2 ) and 703°C (phase field: GaSb ϩ Ga 2 Pt ϩ Ga 7 Pt 3 ), respectively.…”

Section: Ga-pt-sbsupporting

confidence: 61%

Ni, Pd, or Pt as contact materials for GaSb and InSb semiconductors: Phase diagrams

Ipser

Richter

2003

J. Electron. Mater.

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As processing, and even use, of semiconductor devices usually includes the exposure to elevated temperatures, interface reactions often occur, especially during metallization and further heat treatment. It is thus important to understand the corresponding phase equilibria of the involved elements. We present here the phase diagrams of Ni, Pd, and Pt with GaSb and InSb; experimental results in the systems Ga-M-Sb and In-M-Sb (M ϭ Ni, Pd, Pt) are summarized and are discussed in the context of contact chemistry. For GaSb and InSb, it is found that, from a thermodynamic point of view, binary and ternary compounds in equilibrium with the corresponding semiconductor would be the best choice for contact materials as these contacts will remain stable even after long exposure to elevated temperatures.

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Section: Ga-pt-sbsupporting

confidence: 61%

Ni, Pd, or Pt as contact materials for GaSb and InSb semiconductors: Phase diagrams

Ipser

Richter

2003

J. Electron. Mater.

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“…4a-d, are based on the experimentally determined isothermal section of the Ni-Ga-Sb, 7 Pd-Ga-Sb, 8 Pt-Ga-Sb, 9 and Au-Ga-Sb 4 systems, respectively. The bold solid or bold dashed lines shown on the experimentally determined phase diagrams coincide with the tie-lines calculated in our study.…”

Section: The Selected Binary Phases and Their Gibbs Energies Or Entmentioning

confidence: 99%

“…The phase equilibria in the ternary Pt-Ga-Sb system have been investigated by Markovski et al 9 and b a Fig. 3.…”

Section: The Selected Binary Phases and Their Gibbs Energies Or Entmentioning

confidence: 99%

“…A compilation of these binary phases provides the following list: V 8 Ga 41 , CrGa 4 , MoGa 2 , Mo 6 Ga 31 , Mo 8 Ga 41 , MnGa, Mn 3 Ga 7 , MnGa 3 , Mn 9 Ga 41 , ReGa 5 , Fe 3 Ga 4 , FeGa 3 , RuGa 3 , OsGa 3 , CoGa 3 , RhGa 3 , Rh 2 Ga 9 , IrGa 3 , Ir 2 Ga 9 , IrGa 6 , Ni 2 Ga 3 , 7 NiGa 4 , PdGa, 8 PdGa 5 , PtGa 2 , 9 Pt 3 Ga 7 , 9 PtGa 6 , CuGa 2 , AuGa, 4 AuGa 2 , 52 TiSb 2 , ZrSb 2 , HfSb, NbSb 2 , TaSb 2 , CrSb, 11 CrSb 2 , NiSb 2 , 6,7 NiSb, 6,7 and PtSb 2 . 9 Because the contacts may be subjected to elevated temperatures during processing or long-term device operation, phases with low melting temperatures should be disregarded as potential contact materials. We choose a cutoff of 800˚C.…”

Section: The Selected Binary Phases and Their Gibbs Energies Or Entmentioning

confidence: 99%

“…[1][2][3][4] Recently, interest in the GaSb family of semiconductors has grown because of their potential for both optoelectronic and electronic devices. 5 Unfortunately, experimentally determined, ternary-phase diagrams are available for only a few metal-Ga-Sb systems, i.e., Ni, 6,7 Pd, 8 Pt, 9,10 and Au. 4 In addition, limited information is available for a few sections of these phase diagrams: GaSb-CrSb, 11 GaSb-MnSb, 12 and GaSb-Ag.…”

Section: Introductionmentioning

confidence: 99%

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Condensed phase equilibria in transition metal-Ga-Sb systems and predictions for thermally stable contacts to GaSb

Liu

Mohney

2003

Journal of Elec Materi

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Antimonide-based compound semiconductors are promising candidates for high-frequency, low-power electronic devices as well as a variety of optoelectronic devices. To assist with the design of shallow or thermally stable contacts, we have performed thermodynamic calculations to estimate ternary phase equilibria in many of the transition metal-Ga-Sb systems. We have used the results of our calculations and a limited number of experiments to identify candidates for nonreactive elemental contacts to GaSb. Both W and Re are clearly in thermodynamic equilibrium with GaSb under the conditions considered in our study. Metal gallides and antimonides that are candidates for thermally stable contacts to GaSb are also highlighted.

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