2023
DOI: 10.3390/photonics10080946
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Phase Shifting Approaches and Multi-Channel Interferograms Position Registration for Simultaneous Phase-Shifting Interferometry: A Review

Fuzhong Bai,
Jiwei Lang,
Xiaojuan Gao
et al.

Abstract: Simultaneous phase-shifting interferometry (SPSI) can simultaneously obtain multiple phase-shifted interferograms and can realize the dynamic wavefront measurement with the use of a phase-shifting algorithm. From the respect of a beam-splitting technique and phase shift achievement of the phase-shifting units, research progress on spatial phase shifting approaches for SPSI systems are classified and summarized, and the key problem affecting SPSI technology is discussed. To ensure the measurement accuracy, it i… Show more

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Cited by 4 publications
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“…One significant drawback is that the size of the optical elements is directly dependent on the size of the surface being measured when inspecting flat and convex surfaces [ 38 ]. Additionally, the air path section between the interferometer and measured object may experience vibrations and phase inhomogeneities, reducing the reliability of the interference methods [ 39 , 40 ]. Hence, photogrammetric methods, namely those using structured light, were chosen.…”
Section: Methodsmentioning
confidence: 99%
“…One significant drawback is that the size of the optical elements is directly dependent on the size of the surface being measured when inspecting flat and convex surfaces [ 38 ]. Additionally, the air path section between the interferometer and measured object may experience vibrations and phase inhomogeneities, reducing the reliability of the interference methods [ 39 , 40 ]. Hence, photogrammetric methods, namely those using structured light, were chosen.…”
Section: Methodsmentioning
confidence: 99%