Phase shifting interferometry using a spatial light modulator to measure optical thin films

Villalobos-Mendoza, Brenda; Granados-Agustín, Fermín; Aguirre-Aguirre, Daniel; Cornejo-Rodriguez, Alejandro

doi:10.1364/ao.54.007997

Cited by 23 publications

(12 citation statements)

References 12 publications

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“…Interferometry is generally categorized as coherent interferometry base on phase shifting techniques and incoherent interferometry using a broadband light source. Although monochromatic phase shifting interferometry (PSI) can be used in film thickness measurements, it needs additional techniques to overcome the 2π-ambiguity and determine the initial position of the target or the interference fringe order [ 60 , 61 ]. Regarding the measurement of continuously varying film layers and its variations [ 60 ], PSI was used to evaluate the film thicknesses, and especially, an electronic speckle pattern interferometer (ESPI) was adopted to monitor the temporal variation of film layer thickness [ 62 ].…”

Section: Technology and Analysis In Optical Film Metrologymentioning

confidence: 99%

Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures

Joo

Park

2022

Micromachines

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In this review, we present the recent progress on film metrology focused on the advanced and novel technologies during the last two decades. This review consists of various technologies and their measurement schemes to provide the inspiration for understanding each of the measurement principles and applications. In the technology and analysis section, several optical techniques used in film metrology are introduced and described with their benefits and limitations. The temporal, spatial and snapshot measurement schemes of optical film metrology are introduced in the measurement scheme section, and finally, the prospect on optical film metrology will be provided and discussed with the technology trend.

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Section: Technology and Analysis In Optical Film Metrologymentioning

confidence: 99%

Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures

Joo

Park

2022

Micromachines

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“…SLMs are polarization-sensitive devices and these can modulate SOP of light. Having optimized modulation characteristics, SLMs are the most promising dynamic optical elements in modern imaging applications such as beam shaping [1], digital holography [2], phase-shifting interferometry [3], and biophysics [4]. Most of the SLMs are composed of a systematic alignment of liquid crystal (LC) cells in specific patterns [5].…”

Section: Introductionmentioning

confidence: 99%

“…Numerous techniques on SLM characterization have been reported in the recent past [5,[8][9][10][11][12][13][14]. These techniques can be divided into two main categories, that is, phase characterization techniques [1,3,9,10,15,16] and amplitude and intensity characterization techniques [12,14,15,[17][18][19]. SLMs are most effective for their amplitude and phase modulation characteristics and hence most of the calibration methods revolve around phase characterization of SLM.…”

Section: Introductionmentioning

confidence: 99%

“…SLMs are most effective for their amplitude and phase modulation characteristics and hence most of the calibration methods revolve around phase characterization of SLM. Jones matrix imaging [8,11,15], fringe shifting interferometry [3], and phase mask-enabled digital holography [10] are well-known techniques to calibrate the phase modulation characteristics of SLM. However, these techniques are not capable to characterize the intensity modulation and other crucial polarimetric characteristics, that is, diattenuation, polarizance, retardance, and SOP of light after passing through SLM.…”

Section: Introductionmentioning

confidence: 99%

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Spatially Addressable Polarimetric Calibration of Reflective-Type Spatial Light Modulator Using Mueller–Stokes Polarimetry

2021

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Mueller–Stokes polarimetry is emerging as a prominent noninvasive imaging technique to study the structural characteristics of an anisotropic medium. Spatial light modulator (SLM) is a programmable liquid crystal device (LCD), which is used to modulate the amplitude, phase, and polarization of light. The compact design and cumbrous manufacturing process of SLM requires its polarimetric calibration prior to its utilization for various applications. In this study, we experimentally demonstrate Mueller–Stokes imaging of a reflective-type SLM (Holoeye, LCR-720) to calibrate its polarization modulation characteristics with respect to its dynamic gray value range (0–255) at different spatial locations of SLM screen. Mueller matrices at 18 different gray values of SLM at an interval of 15, that is, at gray values 0, 15, 30, up to 255 have been experimentally measured using an improvised Mueller matrix imaging polarimeter (MMIP). Crucial polarimetric characteristics, that is, diattenuation, polarizance, state of polarization (SOP), depolarization, and retardance have been estimated with respect to the gray value range of SLM. Significant polarization modulation characteristics [diattenuation (0.08–0.3), polarizance (0.02–0.2), and retardance (0 to π)] have been determined for the SLM. These results indicate that the SLM exhibits spatially variable depolarizing nature and hence it is not perfectly homogeneous in structure. Therefore, it is expected that the outcomes of this study would be helpful for exploring the applicability of Mueller–Stokes polarimetry in advancement of LC technology.

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“…19 Currently, there are techniques that use all the information captured on the image, so the information is extracted from each pixel. One of these techniques is the phase shifting interferometry, 10,20 where three or more interference patterns are needed to obtain the wavefront phase. The shift must be known and controlled; otherwise, the recovered information will be erroneous.…”

Section: Introductionmentioning

confidence: 99%

Study of the factors that affect the correlation behavior during the evaluation of interferograms

2018

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In recent years, the correlation coefficient has been used as a tool for comparison between experimental and synthetic interferograms in algorithms of evaluation, in the areas of optical fabrication and testing. This coefficient has been used with the aim of eliminating the observer criterion during the fabrication process, and in this sense, to make a quantitative test to compare experimental and synthetic interferograms using the correlation as a parameter of evaluation. However, this coefficient is dramatically affected when laboratory conditions are not adequate. Therefore, in this work, we present a detailed analysis of the correlation behavior when interferograms with different values of visibility, Gaussian noise, and background illumination are evaluated/correlated. To analyze the correlation behavior, we simulated different interferograms, where these parameters were varied and examined how they affect the interference patterns. We found that a bad illumination dramatically affects the value of correlation, causing it to decrease to 0.1046, with σ ¼ 0.1.

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Phase shifting interferometry using a spatial light modulator to measure optical thin films

Cited by 23 publications

References 12 publications

Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures

Recent Progress on Optical Tomographic Technology for Measurements and Inspections of Film Structures

Spatially Addressable Polarimetric Calibration of Reflective-Type Spatial Light Modulator Using Mueller–Stokes Polarimetry

Study of the factors that affect the correlation behavior during the evaluation of interferograms

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