Phase Shifting with Coplanar Transmission Line Integrated Electrostatic Peristaltic Micropumps

Abstract

This paper demonstrates a novel method of phase-shifting in which a coplanar transmission line is integrated with electrostatic peristaltic micropumps in various configurations. Micropumps are promising devices with many applications. An electrostatic peristaltic micropump has the advantage of having a low profile which can be used for lab-on-a-chip applications. Early research on phase-shifting with micropumps has been theoretically investigated in our group. Simulation results of phase S 21 for these configurations show nearly 236° maximum phaseshifting when, locating micropumps at three different positions or, when varying the relative permittivity of the fluid inside the micropumps. By improving the structure or using different relative permittivity of fluids, large phaseshifting can be achieved. This method of phase-shifting, integrated with micropumps, makes it possible to obtain phase-shifting without bulky and costly digital phaseshifters or other microstrip phase-shifters.