Phase Structure, Wear Resistance and Antimicrobial Response of Austenitic Stainless Steels 316L by Sputtering Cu during Plasma Nitriding and PECVD of Silicon Nitride
Abstract:The surface of stainless steel 316L was plasma nitrided and subsequently deposited with silicon nitride from tetraethylorthosilicate (TEOS):H2:N2 gas mixtures by plasma enhanced chemical vapor deposition (PECVD). A copper mesh was employed to sputter copper atoms onto the surface during the two processes to consider its effect on the microstructure, tribology and antibacterial response of hard surface layers.The surface layers were characterized using XRD, optical and SEM microscopy, EDX analysis, microhardnes… Show more
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