A study of the heat treatment effect on the structure and magnetic properties of the amorphous and nanocrystalline Finemet-type thin films of the compositions Fe 73.9 Si 13.2 B 8.9 Nb 3 Cu 1 and Fe 72.5 Si 14.2 B 8.7 Nb 2 Mo 1.5 Cu 1.1 were performed by means of X-ray diffraction, magneto-optical Kerr-microscopy, and magnetic properties measurement system. The heat treatment leads to magnetic anisotropy decreasing as a result of crystallization processes, which are heavily dependent on the alloy's composition.