Phase transition and microstructure change in Ta–Zr alloy films by co-sputtering

Internal oxidation of laminated ternary Ru–Ta–Zr coatings

“…The XRD pattern of the as-deposited nanolaminated Ta 0.49 Zr 0.51 (R1) coating exhibited a strong bcc ␤-Zr (110) reflection at 2-36 o , overlapping with that of a nanocrystalline ␣-Zr matrix. Amorphous or near-amorphous Ta-Zr films have been fabricated in previous studies [19,20]. In our previous study [21], as-deposited Ta-Zr coatings with 24-45 at.% Zr and prepared at 400 • C demonstrated a near-amorphous structure.…”

Properties of nanocrystalline and nanocomposite WxZr1−x thin films deposited by co-sputtering

“…The films ranging from pure zirconium to W 0.72 Zr 0.28 (I W ¼ 0.4 A) are X-ray amorphous with a full width at half maximum (FWHM) of the main modulation in the 5.7-8 range. Sputtered zirconium films synthesized by other authors present a nanocrystalline structure [17,18] but for the Zr 1Àx Cu x system the films were found X-ray amorphous for x as low as 0.05 [19] and many films sputter deposited on the basis of binary Zr alloys are Xray amorphous [17][18][19][20]. This is an indication that the crystalline structure can be easily destabilized by changing the energy of the particles impinging the growing film.…”

Co-sputtered amorphous Nb–Ta, Nb–Zr and Ta–Zr coatings for corrosion protection of cyclotron targets for [18F] production

“…Other authors also showed wider range of amorphous phase formation for Ta-Zr alloy [30,32]. It shows that for the sputtering process the thermodynamic model cannot describe the situation properly because kinetics plays the key role in the structure formation.…”

“…According to the empirical rules [62,63], the negative enthalpy of mixing and high radius Zr alloys by co-sputtering [32] and co-condensation [30] in a range of compositions.…”

“…Thus the glass forming ability (GFA) can be improved and the amorphization ranges are wider when metallic alloy coating is formed by non-equilibrium processes as sputtering [27,28] or ion beam mixing. Hereby amorphous Ta-Zr alloy coatings were prepared by ion beam mixing [29], cocondensation [30] and co-sputtering [31,32]. Formation of Ta-rich amorphous phases by high current pulse electron beam melting of Nb-Ta multilayers was mentioned [33].…”