Phenomenological and electrical modelization of microcoaxial probes for SNMM

Abstract

We are presenting an unusual set microcoaxial for RF field, associated with a submicron position sensor. The near field is determined experimentally and calculated theoretically with comparative experiments. The measurements are interpreted as an electric model of the probe for applications on the submicron components. © 2009 Wiley Periodicals, Inc. Microwave Opt Technol Lett 51: 1765–1769, 2009; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24448