Ellipsometry - Principles and Techniques for Materials Characterization 2017
DOI: 10.5772/intechopen.70254
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Photoelastic Modulated Imaging Ellipsometry

Abstract: Photoelastic modulator (PEM)-based ellipsometry employed either lock-in amplifiers or the Fourier analysis technique to obtain the ellipsometric parameters almost in real-time that makes the system with a feature of fast measurement speed, higher stability, and sensitivity at small retardations. Since the PEM modulation frequency is too high to compare it with the exposure time of the camera, photoelastic modulator-based approach is not applicable for a two-dimensional ellipsometric measurement. Here, we repre… Show more

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