2005
DOI: 10.1016/j.ssc.2004.12.036
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Photoluminescence characteristics from amorphous SiC thin films with various structures deposited at low temperature

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Cited by 54 publications
(27 citation statements)
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“…We observed a broad emission band at 438 nm and a shoulder at 522 nm. The blue emission is the result of the quantum size confinement effect as suggested by Xu et al for porous SiC [15,16], whereas the green luminescence emission centered at 522 nm has been found to be similar to that observed in bulk 3C-SiC and on porous silicon samples [17]. In Fig.…”
Section: Methodssupporting
confidence: 70%
“…We observed a broad emission band at 438 nm and a shoulder at 522 nm. The blue emission is the result of the quantum size confinement effect as suggested by Xu et al for porous SiC [15,16], whereas the green luminescence emission centered at 522 nm has been found to be similar to that observed in bulk 3C-SiC and on porous silicon samples [17]. In Fig.…”
Section: Methodssupporting
confidence: 70%
“…Recently, the films consisting of nanocrystalline silicon (nc-Si) in amorphous SiC matrix have attracted much attention because of the unique properties of nc-Si films and their potential applications in optoelectronic devices [1][2][3]. By controlling the nc-Si size, spacing and the surrounding dielectric materials (SiO 2 , SiC, SiN, etc.…”
Section: Introductionmentioning
confidence: 99%
“…It can be seen that SiO 2 colloidal monolayer and SiC films have a weak emission band located mainly in the red region. Zhou and Xu have reported a similar emission spectrum from SiC and the origin of the PL is attributed to the vacancy and surface states [13,21]. From the comparison, it is obvious that the PL intensities of SiC nanorod arrays increase, accompanying with five characteristic emission centers.…”
Section: Resultsmentioning
confidence: 88%