Physical processes in a low-power inductive plasma source in the presence of a weak magnetic field

Abstract

Research into the influence of a weak external magnetic field (<150 G) on the efficiency of power coupling to plasma and on the structure of axial RF fields in plasma is presented. Power
 coupling to the discharge plasma as well as the structure of the axial component of RF magnetic fields are shown to depend on the external magnetic field’s magnitude in a nonmonotous manner.