Piezoelectric actuated multiple channels optical switch

Abstract

In this article, a novel multi-channel optical switch that is composed of a Y-shaped micromirror with two symmetrically reflective surfaces, a fixed pivot for mounting the micromirror, and a piezoelectric actuator to actuate the micromirror, is proposed. Working principle of this novel device is that the switching displacement of the reflective beam of light can be linearly controlled by the displacement of the piezoelectric actuator. Accordingly, the 1xN switching task can be easily achieved. To realize the proposed concept, UV-LIGA technique was implemented to fabricate the components. Multiple-switching concept was demonstrated through experiments. Efficiency of the proposed optical switch was investigated by computer simulations. Optical efficiency of the proposed device can be optimized if its dimensions are adequately designed