2020
DOI: 10.1088/1361-6668/ab877c
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Planar MoRe-based direct current nanoSQUID

Abstract: We have developed planar nanoSQUID with nanobridge-type Josephson junctions based on the oxidation resistant and high H c2 MoRe alloy. The objective of the research was to reduce size of the SQUID loop with the aim being to reduce magnetic flux noise and improve the spatial resolution of the SQUID sensors. Employing RF-magnetron sputtering, electron-beam lithography, and reactive ion etching in CHF 3 + O 2 plasma using Al hard masks, we have realized nanoSQUIDs with Josephson junctions in the form of 30 − 50 n… Show more

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Cited by 8 publications
(13 citation statements)
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“…1). From this fit, we extracted a London penetration depth l L = 405(10) nm at T = 5.5 K, which agrees well with static-field nano-superconducting quantum interference device measurements (28).…”
Section: Temperature-and Field Dependence Of the Spin-wave Dispersion...supporting
confidence: 80%
“…1). From this fit, we extracted a London penetration depth l L = 405(10) nm at T = 5.5 K, which agrees well with static-field nano-superconducting quantum interference device measurements (28).…”
Section: Temperature-and Field Dependence Of the Spin-wave Dispersion...supporting
confidence: 80%
“…Thermal hysteresis is observed in nanobridge JJs that have sufficiently large critical currents I c , while the I ( φ ) dependence becomes multivalued when the length L of a nanobridge JJ exceeds the coherence length ξ by a factor of ~3.5 [ 1 ], depending on the shape of the nanobridge. In Nb thin films, ξ (0 K) is ~10 nm, resulting in the need for sophisticated 10 nm preparation technology for non-hysteretic operation [ 2 , 3 , 4 ]. Nb-based nanobridge JJs that have a length of ~100 nm show non-hysteretic operation only over a narrow temperature range above 7.2 K [ 5 ].…”
Section: Introductionmentioning
confidence: 99%
“…The magnetic flux resolution of the present measurement system √ S Φ ∼ = √ S v /(∂V/∂Φ) 1.9 µΦ 0 / √ Hz, where the derivative ∂V/∂Φ ∼ = 525 µV/Φ 0 . For comparison with other planar nanoSQUIDs, flux noise values of 1.7 µΦ 0 / √ Hz [22] and 0.3 µΦ 0 / √ Hz [23] have been achieved for nanoSQUIDs with hysteretic I(V) characteristics measured at temperatures of T c . By increasing the thickness of the NbN layer, nanoSQUIDs with NbN-TiN-NbN nJJs also become hysteretic in their I(V) characteristics.…”
Section: Discussionmentioning
confidence: 99%
“…Multilayers of NbN/TiN have enhanced mechanical, anticorrosion, and superconducting properties when compared with single-layer NbN and TiN films [18][19][20]. MoRe is another corrosion-resistant superconducting material that has been used for the preparation of nanoSQUIDs [21,22]. Thin films of NbN and MoRe have relatively large energy gaps 2∆ ~5 meV.…”
Section: Introductionmentioning
confidence: 99%
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