In this work, we report on the preparation and characterization of the planar and ridge
optical waveguides in the
E
r
3
+
-doped germanate glass by combining
hydrogen ion implantation and precise diamond blade dicing. The
nuclear energy loss and the implantation depth were calculated by the
SRIM 2013 software. The refractive index profile was obtained by the
reflectivity calculation method. The dark-mode spectrum and the
near-field intensity distribution were measured by the prism coupling
system and end-face coupling technique, respectively. This work has
important reference significance for the development of
E
r
3
+
-doped germanate glass active devices
in the optical communication field.