1990
DOI: 10.1351/pac199062091743
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Plasma and nitrides: application to the nitriding of titanium

Abstract: -Plasmas technologies are known to be very efficient for surface treatments, and this is the case for the production of titanium nitride. We demonstrate an increase of the kinetics due to the plasma in a diffusion reactor. Different growth laws have been obtained, they depend on the substrate surface state, on the temperature and on the active species flux. The competition between nitrogen atoms recombination and diffusion processes is also discussed.

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Cited by 48 publications
(17 citation statements)
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“…Whereas, it has been recently reported that the nitridation of the Ti-based compounds (TiO 2 and LTO) can form a more conductive TiO x N y species [27][28][29][30][31]. Motivated by this, herein, a simple ammonia treatment was applied to form thin TiO x N y layers covered on the primary nanoparticles' surface of the mesoporous LTO spheres to improve their whole electrical conductivity.…”
Section: Introductionmentioning
confidence: 99%
“…Whereas, it has been recently reported that the nitridation of the Ti-based compounds (TiO 2 and LTO) can form a more conductive TiO x N y species [27][28][29][30][31]. Motivated by this, herein, a simple ammonia treatment was applied to form thin TiO x N y layers covered on the primary nanoparticles' surface of the mesoporous LTO spheres to improve their whole electrical conductivity.…”
Section: Introductionmentioning
confidence: 99%
“…Hal ini karena ukuran atom nitrogen sebesar 0,92 Å masih jauh lebih kecil daripada ukuran atom titanium. Proses difusi interstisi sangat dipengaruhi oleh kelowongan pada struktur kristal dan koefisien difusi dari nitrogen [10]. Nilai koefisien difusi sangat bergantung pada suhu proses.…”
Section: Pembahasanunclassified
“…Selain itu, ukuran kelowongan kisi (vacancy site) juga mempengaruhi proses difusi, seperti ukuran kelowongan kisi oktahedral yang lebih besar dibandingkan dengan kelowongan kisi tetrahedral akan menyebabkan nitrogen terlarut cenderung menempati kelowongan kisi oktahedral karena akan membutuhkan energi difusi yang lebih rendah [10] …”
unclassified
“…A strong positive correlation was found between them, whilst the rotational temperature, the electron temperature and density had little correlation with the nitriding degree. It should be noted that the XRD pattern of the irradiated titanium remains that of Ti metal (a phase) [10]. That is, it consists of an interstitial solid solution of nitrogen in the closed-packed hexagonal lattice of titanium.…”
Section: Surface Modification To Several Hundreds Of Nanometer Depth mentioning
confidence: 99%
“…Another example is surface modification of various functional metal surfaces, where the reactions to several tens of nanometers from the surface are essential to improve the characteristics of the substrate materials. For instance, Gicquel et al [10] studied the relationship between plasma and nitrides in nitriding of titanium. They showed that the discharge condition drastically changed the nitrogen concentration to the several hundreds of nanometer depth.…”
Section: Surface Modification To Several Hundreds Of Nanometer Depth mentioning
confidence: 99%