Plasma parameters in 40 MHz Argon discharge

Azooz, A. A.; Çakır, Serhat; Bleej, Diyar A.

doi:10.1016/j.rinp.2015.01.005

Cited by 1 publication

(1 citation statement)

References 19 publications

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“…shows the electron temperature (Te) decreased with increase working pressure, from (0.007 to 0.03) torr, increasing pressure leads to a reduced average of the free path for electron collisions, so that electrons ionize to the atoms will be, then more frequently to give a higher plasma density, where electrons may easily lose their energy resulting in a reduced electron temperature, on other hand at pressure values increase the "Paschen minimum", stubborn collisions become more dominant resulting in a decreasing of plasma electron temperature. These results are in agreement with results of previous Study (16).…”

Section: Figure 6 the Emission Spectra For Plasma Argon At Differentsupporting

confidence: 94%

Plasma Spectroscopy Diagnostics of V2O5 at a Variable of Operating Power and Pressure With Radio Frequency Magnetron Sputtering.

al.¹

2019

Baghdad Sci.J

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In this paper, we investigate the basic characteristics of "magnetron sputtering plasma" using the target V2O5. The "magnetron sputtering plasma" is produced using "radio frequency (RF)" power supply and Argon gas. The intensity of the light emission from atoms and radicals in the plasma measured by using "optical emission spectrophotometer", and the appeared peaks in all patterns match the standard lines from NIST database and employed are to estimate the plasma parameters, of computes electron temperature and the electrons density. The characteristics of V2O5 sputtering plasma at multiple discharge provisos are studied at the "radio frequency" (RF) power ranging from 75 - 150 Watt and gas pressure (0.03, 0.05 and 0.007) torr. One can observe that the intensity of the emission lines increases with increasing the sputtering power. We find that the electron temperature excess drastically from 0.95 eV to 1.11eV when the emptying gas pressure excess from 0.03 to 0.05 Torr. On other hand excess electron temperature from 0.9 to 1.01 eV with increasing sputtering power from 100 to 125 Watt, while the electron density decrease from 5.9×1014 to 4.5×1014 cm-3 with increasing sputtering power. and electron density decrease with increasing of pressure from 4.25×1014 to 2.80×1014 cm-3, But the electron density maximum values 5.9×1014 at pressure 0.03 Torr.

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Section: Figure 6 the Emission Spectra For Plasma Argon At Differentsupporting

confidence: 94%

Plasma Spectroscopy Diagnostics of V2O5 at a Variable of Operating Power and Pressure With Radio Frequency Magnetron Sputtering.

al.¹

2019

Baghdad Sci.J

View full text Add to dashboard Cite

show abstract

Plasma parameters in 40 MHz Argon discharge

Cited by 1 publication

References 19 publications

Plasma Spectroscopy Diagnostics of V2O5 at a Variable of Operating Power and Pressure With Radio Frequency Magnetron Sputtering.

Plasma Spectroscopy Diagnostics of V2O5 at a Variable of Operating Power and Pressure With Radio Frequency Magnetron Sputtering.

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