Plasma Science and Technology in the Limit of the Small: Microcavity Plasmas and Emerging Applications

Eden, J. G.; Park, S.-J; Cho, J. H.; Kim, M. H.; Houlahan, Thomas J.; Li, B.; Kim, E. S.; Kim, T. L.; Lee, S. K.; Kim, Kang Su; Yoon, Jongseung; Sung, Soo Hak; Sun, Peter P.; Herring, C. M.; Wagner, C. J.

doi:10.1109/tps.2013.2253132

Cited by 58 publications

(31 citation statements)

References 27 publications

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“…These structures have been studied by Eden et al [9]. The use of inverse pyramidal cathode holes, generated by means of Si-edging allowed the production of large arrays of microcavity discharges [57].…”

Section: Operation Of Microcavity Dischargesmentioning

confidence: 99%

“…The most recent topical review paper which covers microplasmas, but expands the view to include transient, filamentary plasmas, was published in 2013 [6]. Other review papers, which focus on subsets of microdischarges and microdischarge applications, include those on UV light sources [7], microdischarge based sensors [8], photonic devices [9], guided ionization waves in plasma jets [10,11] and microwavesustained microplasmas [12]. An application, which has gained strongly in interest by the scientific community is plasma medicine.…”

Section: Introductionmentioning

confidence: 99%

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20 years of microplasma research: a status report

Schoenbach

Becker²

2016

Eur. Phys. J. D

176

112

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Abstract. The field of microplasmas gained recognition as a well-defined area of research and application within the larger field of plasma science and technology about 20 years ago. Since then, the activity in microplasma research and applications has continuously increased. A survey of peer reviewed papers on microplasmas published annually shows a steady increase from fewer than 20 papers in 1995 to about 75 in 2005 and more than 150 in 2014. This count excludes papers that deal exclusively with technological applications where the microplasma is used solely as a tool. This topical review aims to provide a snap shot of the current state of microplasma research and applications. Given the rapid proliferation of microplasma applications, the topical review will focus primarily on the status of microplasma science and our understanding of the physics principles that enable microplasma operation. Where appropriate, we will also address microplasma applications, however, we will limit the discussion of microplasma applications to examples where the application is closely tied to the plasma science. No attempt is made to provide a comprehensive and in-depth review of the diverse range of all microplasma applications, except for the inclusion of a few key references to recent reviews of microplasma applications.

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Section: Operation Of Microcavity Dischargesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

20 years of microplasma research: a status report

Schoenbach

Becker²

2016

Eur. Phys. J. D

176

112

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“…Non-thermal microplasmas at atmospheric pressure, which are geometrically confined to small dimensions ranging from micrometers to a few millimeters, have gained significant traction in a wide range of technological applications over the past 20 years, including light sources, photonic devices and sensors [1][2][3][4]. Details on the characteristics of microplasma sources, their designs, modes of operation and potential applications have been discussed in the following review articles [1,[5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Microplasma Array Patterning of Reactive Oxygen and Nitrogen Species onto Polystyrene

Szili

Dedrick

et al. 2017

Front. Phys.

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We investigate an approach for the patterning of reactive oxygen and nitrogen species (RONS) onto polystyrene using atmospheric-pressure microplasma arrays. The spectrally integrated and time-resolved optical emission from the array is characterized with respect to the applied voltage, applied-voltage frequency and pressure; and the array is used to achieve spatially resolved modification of polystyrene at three pressures: 500, 760, and 1000 Torr. As determined by time-of-flight secondary ion mass spectrometry (ToF-SIMS), regions over which surface modification occurs are clearly restricted to areas that are exposed to individual microplasma cavities. Analysis of the negative-ion ToF-SIMS mass spectra from the center of the modified microspots shows that the level of oxidation is dependent on the operating pressure, and closely correlated with the spatial distribution of the optical emission. The functional groups that are generated by the microplasma array on the polystyrene surface are shown to readily participate in an oxidative reaction in phosphate buffered saline solution (pH 7.4). Patterns of oxidized and chemically reactive functionalities could potentially be applied to the future development of biomaterial surfaces, where spatial control over biomolecule or cell function is needed.

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“…The European Physical Journal Special Topics 10 A/cm 2 (at currents of 1 mA in a microplasma device with a 100 µm cathode opening), the power densities in such a microplasma with typical dimensions of 100 µm can reach values on the order of 10 5 Wcm −1 [1]. Progress into the basic science as well as some applications in the first 10 years was summarized in a few reviews [2][3][4][5][6][7].…”

mentioning

confidence: 99%

“…A number of reviews focused on selected areas of microplasma applications [8][9][10][11][12][13]. The development of excimer lamps with emissions in the VUV was one of the first application-oriented developments using microplasmas [7].…”

mentioning

confidence: 99%

Microplasmas, a platform technology for a plethora of plasma applications

Becker

2017

Eur. Phys. J. Spec. Top.

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Publications describing microplasmas, which are commonly defined as plasmas with at least one dimension in the submillimeter range, began to appear to the scientific literature about 20 years ago. As discussed in a recent review by Schoenbach and Becker [1], interest and activities in basic microplasma research as well as in the use of microplasma for a variety of application has increased significatly over the past 20 years. The number of papers devoted to basic microplasma science increased by an order of magnitude between 1995 and 2015, a count that excludes publications dealing exclusively with technological applications of microplasmas, where the microplasma is used solely as a tool. In reference [1], the authors limited the topical coverage largely to the status of microplasma science and our understanding of the physics principles that enable microplasma operation and further stated that the rapid proliferation of microplasma applications made it impossible to cover both basic microplasma science and their application in a single review article.Some microplasmas are thermal in nature, where the gas temperature is far above the room temperature and is approaching the electron temperature. Another group of microplasmas is nonthermal (also referred to as nonequilibrium or "cold"), with gas temperatures much below electron temperatures. Their electron energy distribution contains a tail of high energy electrons, which causes high excitation, ionization, and dissociation rates. Research into nonthermal microplasmas has enjoyed an enormous growth in the past two decades. These plasmas are particularly attractive for a plethora of applications because they can be operated stably at high gas pressures, in rare gases as well as in molecular gases and gas mixtures, operated in a direct current (dc) mode as well as in pulsed dc and alternate current (ac) modes. Modeling and improved diagnostics have allowed us in the past decade to gain more insight into the specific properties of nonthermal micro-plasmas. Electron densities exceeding 10 16 cm −3 have been measured in pulsed microplasmas [1]. Gas temperatures, on the other hand, can be close to room temperature at low currents in rare gases and generally reach not more than 2000 K in atmospheric-pressure air microplasmas. With discharge voltages of a few hundred volts, and current densities on the order of a

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Plasma Science and Technology in the Limit of the Small: Microcavity Plasmas and Emerging Applications

Cited by 58 publications

References 27 publications

20 years of microplasma research: a status report

20 years of microplasma research: a status report

Microplasma Array Patterning of Reactive Oxygen and Nitrogen Species onto Polystyrene

Microplasmas, a platform technology for a plethora of plasma applications

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