Plasma-source ion implantation compared with glow-discharge plasma nitriding of stainless steel

Günzel, R.; Betzl, M.; Alphonsa, I; Ganguly, Bichitra Nandi; John, P. I.; Mukherjee, S. K.

doi:10.1016/s0257-8972(98)00776-2

Cited by 26 publications

(11 citation statements)

References 9 publications

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“…Much work focused on improvement of components made from stainless steel [86][87][88][89][90][91][92][93][94][95][96][97][98][99], tool steel [6,19,45,[100][101][102][103][104][105][106][107][108][109], tungsten carbide [110], nickel alloys [6,111], chromium [112], pure aluminum [113,114] and titanium and aluminum alloys [20,49,[115][116][117][118][119][120][121]. Möller and coworkers [122] describe PBII of nitrogen as "favorable boundary conditions for the efficiency of diffusive surface treatment."…”

Section: A Reduction Of Wear and Corrosion Applications In Metallurgymentioning

confidence: 99%

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Pelletier

Anders

2005

IEEE Trans. Plasma Sci.

175

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After pioneering work in the 1980s, plasma-based ion implantation (PBII) and plasma-based ion implantation and deposition (PBIID) can now be considered mature technologies for surface modification and thin film deposition. This review starts by looking at the historical development and recalling the basic ideas of PBII. Advantages and disadvantages are compared to conventional ion beam implantation and physical vapor deposition for PBII and PBIID, respectively, followed by a summary of the physics of sheath dynamics, plasma and pulse specifications, plasma diagnostics, and process modelling. The review moves on to technology considerations for plasma sources and process reactors. PBII surface modification and PBIID coatings are applied in a wide range of situations. They include the by-now traditional tribological applications of reducing wear and corrosion through the formation of hard, tough, smooth, low-friction and chemically inert phases and coatings, e.g. for engine components. PBII has become viable for the formation of shallow junctions and other applications in microelectronics. More recently, the rapidly growing field of biomaterial synthesis makes used 1 of PBII&D to produce surgical implants, bio-and blood-compatible surfaces and coatings, etc.With limitations, also non-conducting materials such as plastic sheets can be treated. The major interest in PBII processing originates from its flexibility in ion energy (from a few eV up to about 100 keV), and the capability to efficiently treat, or deposit on, large areas, and (within limits) to process non-flat, three-dimensional workpieces, including forming and modifying metastable phases and nanostructures.We use the acronym PBII&D when referring to both implantation and deposition, while PBIID implies that deposition is part of the process.2

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Section: A Reduction Of Wear and Corrosion Applications In Metallurgymentioning

confidence: 99%

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Pelletier

Anders

2005

IEEE Trans. Plasma Sci.

175

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“…15,16 Roughly speaking, it is generally accepted that for a given process temperature, hydrogen enhances nitrogen diffusion by reducing the surface oxide layer ͑''diffusion barrier''͒. [17][18][19] However, the variety of nitriding techniques ͑e.g., pulsed plasma, glow discharge, gaseous nitriding, etc.͒ and conditions used in the experiments ͑e.g., background pressure, ion current density, ion energy, gaseous mixture, substrate temperature, etc.͒ prevent general conclusions about the key parameters influencing the final properties of the treated surface.…”

Section: Introductionmentioning

confidence: 99%

Effect of hydrogen and oxygen on stainless steel nitriding

Figueroa

Wisnivesky

Alvarez

2002

Journal of Applied Physics

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Articles you may be interested inPlasma nitriding process by direct current glow discharge at low temperature increasing the thermal diffusivity of AISI 304 stainless steel J. Appl. Phys. 113, 063507 (2013); 10.1063/1.4790631Flux effect on the ion-beam nitriding of austenitic stainless-steel AISI 304LNitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films Nitriding stainless steels at moderate temperature: Time-and depth-resolved characterization of the near surface composition during the nitriding processThe influence of hydrogen and oxygen on stainless steel implanted by nitrogen low-energy ions is systematically studied. It is shown that hydrogen intervenes moderately in the process only when the oxygen partial pressure in the deposition chamber is relatively high. For very low-oxygen partial pressures, the energetic nitrogen molecules impinging on the substrate sputter the thin oxide layer formed on the substrate. This allows the growing of a rich nitrogen layer beneath the surface, improving the diffusing of the implanted atom deeper in the bulk material. For higher-oxygen partial pressures, the sputtering is ineffective, and an oxide layer partially covers the surface even in the presence of hydrogen. The maximum depth penetration of nitrogen depends on the degree of oxygen coverage, which is fairly well described by a Langmuir absorption isothermal. Hardness depth profiling is consistent with the existence of a diffusion barrier formed by the oxygen absorbed on the surface. In order to understand the role of hydrogen on the nitriding process, samples preimplanted with hydrogen were subsequently treated with nitrogen and the hardness depth profiling analyzed. These results may provide a clue about the practical consequences of oxygen and hydrogen on the nitriding process.

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“…From the same group, Reinhard Günzel and coworkers [21] compared the effectiveness of PIII and glow discharge plasma nitriding (GDPN) of stainless steel. They confirmed that GDPN with pure nitrogen is ineffective because the ion energy at the relatively high process pressures of 500 Pa is only 50 eV, thus too small to penetrate the oxygen surface layer.…”

Section: Concept 1 Nitriding By Immersion Implantation Of Nitrogen Ionsmentioning

confidence: 99%

From plasma immersion ion implantation to deposition: a historical perspective on principles and trends

Anders

2002

Surface and Coatings Technology

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Plasma immersion techniques of surface modification are known under a myriad of names.The family of techniques reaches from pure plasma ion implantation, to ion implantation and deposition hybrid modes, to modes that are essentially plasma film deposition with substrate bias.In the most general sense, all plasma immersion techniques have in common that the surface of a substrate (target) is exposed to plasma and that relatively high substrate bias is applied. The bias is usually pulsed. In this review, the roots of immersion techniques are explored, some going back to the 1800s, followed by a discussion of the groundbreaking works of Adler and Conrad in the 1980s. In the 1990s, plasma immersion techniques matured in theoretical understanding, scaling, and the range of applications. First commercial facilities are now operational. Various immersion concepts are compiled and explained in this review. While gas (often nitrogen) ion implantation dominated the early years, film-forming immersion techniques and semiconductor processing gained importance. In the 1980s and 1990s we have seen exponential growth of the field but signs of slowdown are clear since1998. Nevertheless, plasma immersion techniques have found, and will continue to have, an important place among surface modification techniques.

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Plasma-source ion implantation compared with glow-discharge plasma nitriding of stainless steel

Cited by 26 publications

References 9 publications

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Plasma-based ion implantation and deposition: a review of physics, technology, and applications

Effect of hydrogen and oxygen on stainless steel nitriding

From plasma immersion ion implantation to deposition: a historical perspective on principles and trends

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