2023
DOI: 10.1109/jlt.2023.3260064
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Plasmonic Ferroelectric Modulator Monolithically Integrated on SiN for 216 GBd Data Transmission

Abstract: A high-speed plasmonic barium titanate (BTO, BaTiO3) Mach-Zehnder modulator is presented. We combine nanoscale plasmonics with BTO as solid-state active material and silicon nitride (SiN) for versatile and low loss waveguiding, and integrate them in a monolithic platform. We demonstrate a plasmonic BTO modulator processed onto foundry-produced SiN. The 15 µm long high-speed modulator features a flat electro-optic frequency response up to 70 GHz and is expected to be flat way beyond. A low VπL product of 144 Vµ… Show more

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Cited by 19 publications
(11 citation statements)
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“…The modulation process involves modifying the refractive index of the active medium, situated between the layers of the MOS waveguide, through forward biasing of the MOS waveguide using an external electrical potential applied between the noble metal layer (positive) and the Si layer (ground), as illustrated in figure (2). Upon applying bias to the MOS waveguide, the effective index of the optical mode shifts, leading to variations in the modal overlap between neighboring waveguides [22][23].…”
Section: The Working Principle Of Hybrid Plasmonic Electrooptic Modul...mentioning
confidence: 99%
See 2 more Smart Citations
“…The modulation process involves modifying the refractive index of the active medium, situated between the layers of the MOS waveguide, through forward biasing of the MOS waveguide using an external electrical potential applied between the noble metal layer (positive) and the Si layer (ground), as illustrated in figure (2). Upon applying bias to the MOS waveguide, the effective index of the optical mode shifts, leading to variations in the modal overlap between neighboring waveguides [22][23].…”
Section: The Working Principle Of Hybrid Plasmonic Electrooptic Modul...mentioning
confidence: 99%
“…The results obtained at the telecommunication wavelength (1550 nm) are utilized for validation, comparing them with the outcomes from various previous works that employed similar technology. The validation process and corresponding results are presented in table (2).…”
Section: Validationmentioning
confidence: 99%
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“…This opens the possibility to embed them on many different technological platforms. For example, recent demonstrations showed successful integration on silicon nitride (Kohli et al, 2022) with operation up to 216 GBd symbol rates. This is a very versatile photonic technology, offering ultra-low optical losses together with negligible non-linear absorption in the telecom wavelengths.…”
Section: Future Developmentsmentioning
confidence: 99%
“…Historically, electro-optic organic materials were used first, which led to the term "plasmonic organic hybrid (POH)" approach [26]. Meanwhile also ferroelectric BTO and LiNbO3 plasmonic modulators have emerged [20], [27], [28]. These modulators are of interest when thermal stability might be an issue as they have already shown to sustain temperatures up to 250 °C [20].…”
Section: Introductionmentioning
confidence: 99%