2012 IEEE International Ultrasonics Symposium 2012
DOI: 10.1109/ultsym.2012.0504
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pMUT for high intensity focused ultrasound

Abstract: Capacitive ultrasonic tranducers, cMUTs rely on the electrostatic field between the membrane and a back plate for sensing andactuation. This is an excellent solution for small amplitudes. But the movement of the membrane is physically limited by the bottom plate (risk of collapse). Furthermore, pull-in and linearity considerations restrict the available range to about one percent of thegap. Piezoelectric micromachined ultrasonic transducers, pMUTs, on the other hand have no such restrictions. The excitation is… Show more

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