Poly(dimethyl-siloxane) (PDMS) based micro-optical beam splitters

Abstract

ABSTRACT:A micro-optical beam splitter for integrated optical devices has been designed, fabricated and characterized. Two main configurations of the beam splitters are defined: 1×2 and 1×4. The fabrication is based on soft-lithography and requires a single photolithographic step for master definition. The device is replicated in poly(dimethyl-siloxane) (PDMS). Its working principle is based on total internal reflection. Optical elements e.g., lenses, mirrors and beam splitters, based on PDMS and air as constituent materials are defined. A self alignment system for optical fibers has been also fabricated. Losses of 7.8 ± 1.2 dB for a single beam division are obtained.