Polymer-coated vertical-cavity surface-emitting laser diode vapor sensor

Ansbæk, Thor; Nielsen, Claus Højgaard; Larsen, Niels Bent; Dohn, Søren; Boisen, Anja; Chung, Il-Sug; Larsson, David; Yvind, Kresten

doi:10.1117/12.841935

Cited by 3 publications

(3 citation statements)

References 11 publications

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“…The threshold current of the VCSEL without lens was around 1.3 mA, while the current for the lensed-VCSEL was 1.5 mA. This phenomenon was linked to the presence of polymer material at the VCSEL surface, as microlens insertion slightly changed the reflexion coefficient of the top mirror [28]. Finally, we checked that the DOP (degree of polarization) of all VCSELs was kept higher than 75% after lens integration.…”

Section: Fabrication Of the Collimated Vcsel On Pcbmentioning

confidence: 96%

Implementation of Integrated VCSEL-Based Optical Feedback Interferometry Microfluidic Sensor System with Polymer Microoptics

Zhao

Doucet

et al. 2019

Applied Sciences

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Using the optical feedback interferometry (OFI) technique, we demonstrated a miniaturized and compact sensor system based on a dedicated optical source for flowmetry at the micro-scale. In the system, polymer microlenses were integrated directly on a VCSEL (vertical-cavity surface-emitting laser) chip and the microfluidic channel chip surface using polymer-based micro-fabrication technologies. In particular, at a post-process stage, we integrated a collimation lens on a VCSEL chip of small dimensions (200 µm × 200 µm × 150 µm). This process was enabled by the soft-printing of dry thick resist films and through direct laser writing technology. We performed flow rate measurements using this new compact system, with a conventional bulk glass lens configuration for system performance evaluation. A maximum 33 dB signal-to-noise ratio was achieved from this novel ultra-compact system. To our knowledge, this is the highest signal level achieved by existing OFI based flowmetry sensors.

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Section: Fabrication Of the Collimated Vcsel On Pcbmentioning

confidence: 96%

Implementation of Integrated VCSEL-Based Optical Feedback Interferometry Microfluidic Sensor System with Polymer Microoptics

Zhao

Doucet

et al. 2019

Applied Sciences

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“…2 together with the acetone concentration calculated based on the input flows and the chamber volume. 10 The response of the coated VCSEL is seen to follow the acetone concentration both during filling the chamber with acetone and on purging the chamber with nitrogen. The response is 21 lW for an acetone concentration of 82 000 ppm.…”

mentioning

confidence: 99%

“…1), which avoids the cantilever altogether. 9,10 By depositing the sensor polymer layer directly onto the VCSEL top mirror facet a device more feasible to manufacture is obtained without the need for precision alignment. The swelling caused by absorption of the target vapor changes both the polymer thickness and refractive index, leading to a modulation of the top mirror reflectance.…”

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confidence: 99%

Vertical-cavity surface-emitting laser vapor sensor using swelling polymer reflection modulation

Ansbæk

Nielsen

Dohn

et al. 2012

Applied Physics Letters

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Vapor detection using a low-refractive index polymer for reflection modulation of the top mirror in a vertical-cavity surface-emitting laser (VCSEL) is demonstrated. The VCSEL sensor concept presents a simple method to detect the response of a sensor polymer in the presence of volatile organic compounds. We model the physics as a change in the top mirror loss caused by swelling of the polymer upon absorbing the target volatile organic compound. Further we show how acetone vapors at 82 000 ppm concentration can change the polymer coated VCSEL output power by 20 μW.

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