Polystyrene microspheres with ultra-rough surfaces engineered using RIE technique and applied using SERS
Jizhe Song,
Sujuan Feng,
Haonan Shi
et al.
Abstract:In this study, we successfully fabricated two ultra-rough surfaces based on polystyrene (PS) microspheres by modulating the gas species for the reactive ion etching (RIE) process. Elemental analysis confirmed the...
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