Porous Dielectric Structure and Response Speed of Moisture Sensors
Ronak Ali,
Aaron Swartz,
Riasad Azim Badhan
et al.
Abstract:We made moisture sensors using α-Al2O3 films as porous dielectric materials deposited through the anodic spark deposition (ASD). In this study, a variety number of small pores has been studied to investigate the response speed of moisture sensors. Three different surface morphologies have been studied using scanning electron microscopy (SEM). Sample DM23 has the maximum number of small pores. Small pores are defined as pore size ranging from 40 nm to several hundred nm. Sample TA40 has the minimum number of sm… Show more
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