2022
DOI: 10.3389/fphy.2022.929033
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Porous Silicon–Based Microring Resonator for Temperature and Cancer Cell Detection

Abstract: In this article, a microring resonator sensor based on porous silicon is proposed for temperature and cancer cell detection, simultaneously. The porous behavior of silicon with a large internal surface area allows external materials to interact directly with the guided modes. The resonance wavelength in the transmission spectrum of the microring resonator is very sensitive to external environmental properties such as refractive index and temperature. The transmission characteristics of the proposed sensor were… Show more

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Cited by 10 publications
(7 citation statements)
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“…The ring resonator confines light in a ring-shaped waveguide and allows it to circulate indefinitely 46 . Various materials have been explored for optical switching and ring resonator applications that include silicon (Si), 47 silicon nitride (Si3N4), 48 lithium niobate (LiNbO3), 49 gallium arsenide (GaAs), 50 zinc oxide (ZnO), 51 and aluminum nitride (AlN) 52 , 53 . The silicon substrate is preferred over other materials due to its low intrinsic absorption, high RI, and single-mode operation that confines the light within the ring resonator and enhances its performance.…”
Section: Introductionmentioning
confidence: 99%
“…The ring resonator confines light in a ring-shaped waveguide and allows it to circulate indefinitely 46 . Various materials have been explored for optical switching and ring resonator applications that include silicon (Si), 47 silicon nitride (Si3N4), 48 lithium niobate (LiNbO3), 49 gallium arsenide (GaAs), 50 zinc oxide (ZnO), 51 and aluminum nitride (AlN) 52 , 53 . The silicon substrate is preferred over other materials due to its low intrinsic absorption, high RI, and single-mode operation that confines the light within the ring resonator and enhances its performance.…”
Section: Introductionmentioning
confidence: 99%
“…EEG signals are in the range of around 4 Hz to 100 Hz. Microring resonators have applications in various fields such as sensors, quantum communication, teleportation, and black hole [6] , [7] . In addition, micro-electromechanical systems (MEMS) technology has shown great potential for various kinds of sensors [8] , [9] .…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, the device structure based on SOI platform has become a research hotspot in the field of silicon-based photonic integration and optoelectronic integration. Due to its high quality factor and low loss, the micro ring resonator (MRR) based on SOI is used to produce various optical devices, such as filters [3], optical division multiplexer [4], optical switch [5], sensor [6], etc., which has a wide range of applications in environmental monitoring, homeland security, biochemistry and medical treatment [7,8].Because the transmission lines of traditional micro ring resonators are symmetrical Lorentz type [9], the quality factor and sensitivity are low. By designing a new structure, the transmission line can be changed from Lorentz type to Fano type, or the EIT-Like effect can be generated to improve the quality factor, extinction ratio (ER) and sensitivity of the micro ring resonator [10].…”
Section: Introductionmentioning
confidence: 99%