Practical extracting method of PEB parameters by using rotating compensator spectroscopic ellipsometer

Kim, Hyoung-Hee; Kwon, Il Keun; Park, Seung-Wook; Bang, K. Y.; An, Ilsin; Lee, Kun-Sang; Oh, Hye−Keun

doi:10.1117/12.485071

Advances in Resist Technology and Processing XX 2003

DOI: 10.1117/12.485071

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Practical extracting method of PEB parameters by using rotating compensator spectroscopic ellipsometer

Hyoung-Hee Kim

Il Keun Kwon

Seung-Wook Park³

et al.

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Practical extracting method of PEB parameters by using rotating compensator spectroscopic ellipsometer

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