Ca-P-O system bio-ceramic films were coated by chemical vapor deposition (CVD). CVD is a versatile technique for controlling crystal phase and microstructure, which significantly affect bio-compatibility. By introducing auxiliary energy, laser and plasma, in CVD, much wider range of Ca-P-O coatings can be synthesized. Hydroxyapatite regeneration of the Ca-P-O coatings prepared by CVD techniques were evaluated in a simulated body fluid (SBF).