Preparation and Performance Testing of Green Non-toxic Polishing Solution for Medical Titanium Alloy

Abstract

To obtain a lower toxic residue on medical titanium alloy surfaces in a chemical mechanical polishing (CMP) process, a new green polishing solution is proposed. The humoral fluid was selected as the basic solution in which the silica abrasive particles were used as the grinding particles, and H2O2 was added as the oxidant. A CMP test was carried out for its performance investigation with titanium alloy material. Then the surface roughness and material removal ratio were analyzed and compared with that of an existing polishing solution condition. Finally, the toxic residue of the titanium alloy samples was obtained by scanning electron microscopy. The experimental results indicate that a better material removal rate and surface roughness of titanium alloy with humoral polishing solution were obtained compared to existed polishing solution conditions. More importantly, the content of toxic elements on the sample surface was significantly reduced due to the greater amount of aluminum and vanadium ions dissolved in the polishing solution, which is more beneficial for its application in the medical prosthetics field. This study provides a new reference for the toxic residue reduction on the material surface of medical titanium alloy in CMP process.