2009
DOI: 10.1016/j.ultramic.2008.12.011
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Probe retrieval in ptychographic coherent diffractive imaging

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Cited by 624 publications
(582 citation statements)
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“…For both samples, the ptychographic data set consisted of 270 diffraction patterns, collected with 3 µm step sizes between scan positions. A random offset of ±20% of the step size was added to each scan position to prevent periodic artifacts in the reconstructions [32]. The total EUV exposure time for the uncoated sample was 5.8 min, compared with 23.6 min for the Al-coated sample, with a total scanned area of 4270 µm 2 each.…”
Section: Methodsmentioning
confidence: 99%
“…For both samples, the ptychographic data set consisted of 270 diffraction patterns, collected with 3 µm step sizes between scan positions. A random offset of ±20% of the step size was added to each scan position to prevent periodic artifacts in the reconstructions [32]. The total EUV exposure time for the uncoated sample was 5.8 min, compared with 23.6 min for the Al-coated sample, with a total scanned area of 4270 µm 2 each.…”
Section: Methodsmentioning
confidence: 99%
“…More recent ptychographic studies investigate the maximum derivable information from ptychographic data under non-simple experimental conditions for the illuminating wave-eld or the object such as position uncertainties [20,110,182], partial coherence and multiple wavelenghts [15,44,78,299], multiple object planes [181,284] and undersampling of the recorded di racted intensities [71]. In the rst place, however, the probably most important result has been the understanding that the ptychographic method not only is able to solve for the encoded object information but also for the illuminating wave-eld [183,294,296] making ptychography a valuable tool for analysing the wave-elds of X-rays [134,144,159,160,265,268]. In principle, the decoupling of object and illuminating wave-eld makes the retrieved object information free of aberrations.…”
Section: Ptychographymentioning
confidence: 99%
“…In case of the DM algorithm [294], the probe update appears to be practically carried out only once after cycling through all positions. For this reason, the ePIE update of the object may often be more advantageous than the update of the DM ptychographic algorithm.…”
Section: Ptychographymentioning
confidence: 99%
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