DOI: 10.32657/10356/6329
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Processing and characterization of high permeability thin-film for micro rotating gyroscope development

Abstract: Current advancement in micro motor area is not encouraging. The devices generally suffer from limited lifetime issue. For this reason, most micro gyroscopes are designed to be of a vibrating type. Unfortunately, these designs have a major problem called "drift". Drift arises due to intrinsic instability, which is related to number of mechanical coupling associated with its design. Reliable operation of these gyros would require severe stability of all its parameters. A micro levitation gyroscope design would b… Show more

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