56th Electronic Components and Technology Conference 2006
DOI: 10.1109/ectc.2006.1645860
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Processing and Performance of Broadband Integrated Resistor Structures on non-Planar Topologies in Hermetic Silicon Enclosure with Vertical Micro Vias

Christoffer Greisen1,
R. Hauffe2,
Lior Shiv3
et al.
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