1998
DOI: 10.1002/(sici)1099-0739(199803)12:3<201::aid-aoc692>3.0.co;2-t
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Processing and properties of (Mo,Cr) oxycarbides from MOCVD

Abstract: A review of the coating kinetics of molybdenum and chromium oxycarbides and a study on the properties of deposited films are reported. Molybdenum carbonyl, chromium carbonyl and their mixture were used to prepare coatings at temperatures between 170 and 450 °C on SS304 or SiC substrates by a process of metal‐organic chemical vapor deposition (MOCVD). The processing parameters of the coatings, such as the evaporation of precursors, coating pressure and temperature, are discussed along with the coating rates, co… Show more

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Cited by 20 publications
(8 citation statements)
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“…[1142] as model precursors. The choice was based on the fact that both are readily available, well-established high purity (>99.9%) MOCVD sources with know thermochemical properties [1141,[1143][1144][1145][1146][1147].…”
Section: Vii25 Gas Precursorsmentioning
confidence: 99%
“…[1142] as model precursors. The choice was based on the fact that both are readily available, well-established high purity (>99.9%) MOCVD sources with know thermochemical properties [1141,[1143][1144][1145][1146][1147].…”
Section: Vii25 Gas Precursorsmentioning
confidence: 99%
“…are widely used in numerous applications, such as electronics, optoelectronics, photocatalysis, and energy technologies, superior materials may be found in mixed anion inorganic materials, such as metal oxynitrides, 1,2 oxychalcogenides, [3][4][5] oxycarbides, 6 carbonitrides, 7 borocarbides, 8 and boronitrides. 9 Due to their varied crystal structures, anion ordering, 10 and ability to tune properties with anion composition, mixed anion inorganic materials span a broad range of physical, chemical, and electronic properties, providing opportunities to improve material performance for a variety of applications.…”
Section: Introductionmentioning
confidence: 99%
“…In Figure 2b, for the sample prepared via three-stage MOCVD (black), the peak at approximately 43.2 • is ascribed to MOCVD-processed Mo. The use of Mo(CO) 6 (a carbonyl group precursor) appears to result in carbon contamination and, thereby, a different crystal structure [22][23][24]. However, it is difficult to distinguish between the αand β-CIS phases based only on XRD characterization, because these phases are crystallography coherent.…”
Section: Resultsmentioning
confidence: 99%