Programmable Oscillator Implementation Using 2.5 GHz Mirror-encapsulated BAW Resonator to Achieve $\pm 20$ PPM Overall Stability

Yen, Ernest Ting-Ta; Keegan, Martin; Mukherjee, Sritama; Segovia-Femandez, Jeronimo; Tsai, Kaichien; Bahr, Bichoy; Mohan, Kashvap; Miraikar, Pceyoosh; Ramesh, Harish; Chandrashekaraiah, Mahesh Madhugiri; Yu, Yang; Darwhekar, Yogesh; Chand, Jagdish; Chek, Yf; Jackson, Ricky; Lü, Xiaolin; Ramadass, Yogesh; Qiu, Xiaofan

doi:10.1109/ius54386.2022.9958706

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2024

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“…AlN piezoelectric resonators have been also used as frequency references in oscillators for timing applications and as resonant sensors in closed-loop read-out schemes [141,75,122]. For both application scenarios, a transition from AlN to AlScN enables a lower power consumption for the controlling electronic circuit.…”

Section: Introductionmentioning

confidence: 99%

Micro acoustic metamaterials for innovative AlN/AlScN-based RF MEMS

Zhao

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To my mother and my father. i Contents List of Figures iv List of Tables xii vi 4.5 (a) At-resonance FEM simulated admittance responses (Y) (blue-line) of the 2DRR presented in this work (e.g. with the overhang corrugations, O.C.) and of the corresponding design without O.C. (yellow-line). The same Q (200) has been considered in both simulations. Evidently, the 2DRR reported in this work shows a 0.4 dB boost in |Y (f res)| due to a 5% larger k t 2. The total displacement magnitude distribution across each rod's top surface is also reported for both devices (b), demonstrating how the O.C permit to suppress the modal distortion originated from the lateral stress-free boundaries.

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Section: Introductionmentioning

confidence: 99%