Progress in Aberration-Corrected High-Resolution Transmission Electron Microscopy of Crystalline Solids

Abstract

Summary:With impressive improvements in instrumental resolution and a simultaneous minimisation of image delocalisation, high-resolution transmission electron microscopy is presently enjoying increased popularity in the atomic-scale imaging of lattice imperfections in a variety of solids. In the present overview, recent progress in spherical aberration corrected imaging performed in troika with the ultra-precise measurement of residual wave aberrations and the numerical retrieval of the exit plane wavefunction from focal series of micrographs is illustrated by highlighting their combined use for the atomic-scale measurement of common lattice imperfections observed in compound semiconductors and high-temperature superconductors.