Projection lithography using 125-µm square optical fibers and an LED matrix

Yoda, Shota; Fukuda, Kazuki; Yoshida, Kazumori; Yoshida, Fuga; Iwasaki, Jun-ya; Horiuchi, Toshiyuki; Kobayashi, Hiroshi

doi:10.1117/12.3032437

Photomask Japan 2024: XXX Symposium on Photomask and Next-Generation Lithography Mask Technology 2024

DOI: 10.1117/12.3032437

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Projection lithography using 125-µm square optical fibers and an LED matrix

Shota Yoda,

Kazuki Fukuda,

Kazumori Yoshida

et al.

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Projection lithography using 125-µm square optical fibers and an LED matrix

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References 7 publications

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