2001
DOI: 10.1016/s0257-8972(01)01179-3
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Properties and characterization of multilayers of carbides and diamond-like carbon

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Cited by 81 publications
(31 citation statements)
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“…The W-C:H films were deposited using unbalanced magnetron sputtering in an argon/acetylene atmosphere in a Hauzer HTC-1000 production scale coating system, as described by Strondl et al in Refs. [9] and [10]. The films have a thickness of 2 Am with an adhesive intermediate chromium layer of 200 nm.…”
Section: Methodsmentioning
confidence: 99%
“…The W-C:H films were deposited using unbalanced magnetron sputtering in an argon/acetylene atmosphere in a Hauzer HTC-1000 production scale coating system, as described by Strondl et al in Refs. [9] and [10]. The films have a thickness of 2 Am with an adhesive intermediate chromium layer of 200 nm.…”
Section: Methodsmentioning
confidence: 99%
“…The microstructure of a-C:H:W obviously becomes less pronounced as the ethine flow rate, respectively the volume fraction of the a-C:H matrix, increases. It is noteworthy that none of the depicted a-C:H:W variants shows nanolayers of a periodically alternating W/C ratio, as they can result from the discontinuous contribution of the sputtering process to coating growth due to substrate rotation [10,30,31]. Hence, it can be concluded that, for the a-C:H:W coatings deposited within the scope of this study, the frequency of substrate rotation was sufficiently high, so as to obtain a homogeneous coating composition, which is an optimal prerequisite for the assessment of representative mechanical properties by nanoindentation.…”
Section: Measured Process Variablesmentioning
confidence: 99%
“…There are only a few studies on the structural and mechanical properties of multilayer DLC/BN films. The structural and mechanical properties of multilayer films depend on the composition, number of interfaces and bilayer thickness [10]. A large number of internal interfaces aligned parallel to the substrate surface can retard crack propagation and provide barriers to dislocation movement [11].…”
Section: Introductionmentioning
confidence: 99%