Properties Of Optical Elements With Ultra-High Spatial Frequency Surface Corrugations

Abstract

In this paper we discuss the properties of optical elements fabricated by holographically recording an ultra -high spatial-frequency pattern in a photoresist mask followed by reactive ion etching to transfer this pattern into the surface of a quartz substrate. Such optical elements are envionmentally durable, potentially easy to replicate, and exhibit diffraction efficiencies in excess of 85 %.In addition, two other properties are reported.Such elements at normal (0 °) incidence are antireflective, with broadband reflection coefficients as low as 0.035 %. Also, the elements exhibit artificially produced birefringence making them useful as wave plates. These results may be particularly significant in the UV and IR, where damage -resistant antireflection coatings and transparent birefringent materials may not exist.