Handbook of Silicon Based MEMS Materials and Technologies 2015
DOI: 10.1016/b978-0-323-29965-7.00001-4
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Properties of Silicon

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Cited by 8 publications
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“…As a result, in microfluidic technology, the materials used to develop microfluidic devices are quite crucial. In general, microfluidic devices can be made from a variety of materials, such as silicone [ 108 ], glass [ 109 ], paper [ 110 ], graphene [ 111 ], polydimethylsiloxane (PDMS) [ 112 ], and polymethylmethacrylate (PMMA) [ 113 ]. Table 6 showcases several materials utilized to develop microfluidic biosensors.…”
Section: Methodsmentioning
confidence: 99%
“…As a result, in microfluidic technology, the materials used to develop microfluidic devices are quite crucial. In general, microfluidic devices can be made from a variety of materials, such as silicone [ 108 ], glass [ 109 ], paper [ 110 ], graphene [ 111 ], polydimethylsiloxane (PDMS) [ 112 ], and polymethylmethacrylate (PMMA) [ 113 ]. Table 6 showcases several materials utilized to develop microfluidic biosensors.…”
Section: Methodsmentioning
confidence: 99%