Properties of solution TMI as an OMVPE source

Trimethylindium transport studies: the effect of different bubbler designs

“…The different bubbler concepts were fabricated and filled with solid TMI prior to connection to equipment described previously [2] (see Fig. 1).…”

“…Trimethylindium (TMI) the simple diptube bubbler design has been demonstrated to have a performance range that does not meet all customer requirements, especially at high material transport rates [1,2]. Channelling effects are deemed the main cause of pick up variations and different container geometries have been proposed to achieve improved gas-phase saturation and transport efficiency [1][2][3][4]. In this study, data was obtained for a number of alternative bubbler designs when tested under different conditions of use.…”

Measurement of vapour pressure of In-based metalorganics for MOVPE

“…In order to solve this problem, various improvements in TMI delivery have been used, including a porous and inert support [2], reversing the direction of carrier gas flow in the cylinder [3], dual bubbler system [4], dip tube-less cylinder design [5], and also using TMI in a suspension form in a hydrocarbon [6] or in a low volatility amine medium [7]. One of the most widely used solutions to the problem of inconsistent TMI [1,7,8], which consists of solid TMI suspended in a saturated solution of TMI and 1:1 adduct TMI-N,N-dimethyldodecylamine.…”